Iterative optimization of tail breaking force of 1mil wire thermosonic ball bonding processes and the influence of plasma cleaning

An online tail breaking force measurement method is developed with a proximity sensor between wire clamp and horn. The wire under the tensile load measures about 1.5 cm extending from the bond location to the wire clamp. To increase the sensitivity, the bondhead speed is reduced to 2mm/s during breaking the tail bond. It takes roughly 10ms to break the tail bond. The force resolution of the method is estimated to be better than 5.2mN. An automatic wire bonder used to continuously bond up to 80-wire loops while recording the on-line proximity signals. All wires are directed perpendicular to the ultrasound direction. The tail breaking force for each bond is evaluated from the signal and shown automatically on the bonder within 2min after bonding. Results are obtained for a typical Au wire and a typical Cu wire bonding process. Both wires are 25mm in diameter and bonded on Ag plated diepads of standard leadframes at 220 1C. An average Cu tail breaking force of higher than 50mN is obtained if the leadframe is plasma cleaned before the bonding with 100% Ar for 5min. This result is comparable to that obtained with Au wire. The standard deviation of the Cu tail breaking force is about twice that obtained with Au wire. The tail breaking force depends on the bonding parameters, metallization variation, and cleanliness of the bond pad. The cleanliness of the bonding pad is more important with Cu wire than with Au wire. r 2007 Elsevier Ltd. All rights reserved.